FSD150e & FSD150i

FSD150e & FSD150i is a fully automatic optical inspection equipment (AOI) developed and produced by Ruili Scientific Instruments (Shanghai) Co., Ltd. for the LED market. It is suitable for surface defect detection and epitaxial wafers in the sapphire pattern substrate (PSS) wafer production process. Detection. The system has the characteristics of high resolution, high speed and high cost performance, and can automatically sort based on the detection results. It can not only improve the production efficiency of LED manufacturers, but also provide data for comprehensive yield management. FSD150e & FSD100i have been sold to several customers in the domestic market and received affirmation and praise.


Main features of FSD150e & FSD150i system:

· Low cost of ownership, high stability and high reliability design

· Universal for 4” and 6” wafers

· Suitable for PSS end detection and epitaxial wafer

· Simultaneous detection of micro and macro defects

· Full surface inspection, automatic defect classification, automatic storage of defect images

· High-resolution defect review function

· Automatic sorting based on test results to improve production efficiency

· Provide effective means for managing process drift and provide data for yield management

· Support factory automatic data transmission

FSD150e & FSD150i

FSD150e & FSD150i