FSD100c & 150c

FSD100c & 150c is an AOI device developed by Ruili Scientific Instruments (Shanghai) Co., Ltd. specifically for the detection of the appearance defects of patterned wafers (COW) in the fields of LED, compound semiconductor and optical communication. The system has high resolution, high speed, High cost performance, according to the customer's wafer size, can be customized for 2 inch, 3 inch, 4 inch, 5 inch and 6 inch chip wafer (Chip On Wafer) defect detection. Provide customers with complete control over product shipment quality control and yield improvement during production.

Main features of FSD150c system:


· Low cost of ownership, high stability and high reliability design

· Can match 2 inch, 3 inch, 4 inch, 5 inch and 6 inch wafers according to customer needs

· Suitable for chip inspection (COW)

· Simultaneous detection of micro and macro defects

· Full surface inspection, automatic defect classification, automatic storage of defect images

· High-resolution defect review function

· Automatic sorting based on test results to improve production efficiency

Provide effective means for managing process drift and provide data for yield management

· Support factory automatic data transmission

FSD100c & 150c

FSD100c & 150c