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TFX3000-Optical measuring equipment

TFX3000


TFX3000 is optical thin film measurement equipment for integrated circuit production line 300mm silicon chip with independent intellectual property rights of RSIC. The application range of the product includes etching (Etch), chemical vapor deposition (CVD), lithography (Photolithography) and chemical mechanical polishing (CMP) measurement technology section.


TFX3000--300mm全自动光学膜厚测量系统